REVASUM (ASX: RVS) secures a Letter of Intent to purchase a 6EZ silicon carbide CMP system from SENIC, a leading silicon carbide substrate manufacturing technology company in Cheonan, South Korea
Retrieved on:
Thursday, July 27, 2023
The recent release of the 6EZ's 200mm conversion kit will enable the tool to support 150mm and 200mm SiC substrate manufacturing at the Senic facility in Cheonan, South Korea.
Key Points:
- The recent release of the 6EZ's 200mm conversion kit will enable the tool to support 150mm and 200mm SiC substrate manufacturing at the Senic facility in Cheonan, South Korea.
- The 6EZ CMP system was developed with Revasum's 7AF-HMG SiC grinder to remove sub-surface damage from the grind process.
- The 6EZ provides minimal total thickness variation (TTV) across the wafer and surface roughness (RA) to be on the order of 1.5 Angstroms.
- With the 6EZ already having proved itself in silicon carbide substrate manufacturing, we believe the 6EZ system is the best option for Senic as we increase our production to meet the global industry demands."