AlixLabs AB today announced completing clean room hook up of R&D equipment for Atomic Layer Etch Pitch Splitting (APS)
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Thursday, June 16, 2022
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AlixLabs is now pleased to announce the completed hook-up of Atomic Layer Etch (ALE) equipment in its clean room at ProNano RISE in Lund, Sweden.
Key Points:
- AlixLabs is now pleased to announce the completed hook-up of Atomic Layer Etch (ALE) equipment in its clean room at ProNano RISE in Lund, Sweden.
- The equipment is the original ICP Reactive Etch tool from Oxford Instruments (UK), a Plasmalab 100 used during the original discovery of the APS method.
- "The next opportunity to meet AlixLabs will be at The AVS 22nd International Conference on Atomic Layer Deposition (ALD 2022), featuring the 9th International Atomic Layer Etching Workshop (ALE 2022).
- The patent covers methods to split nanostructures in half by a single process step using Atomic Layer Etching (ALE).