Ultra-Low Profile XY-Theta Nanopositioning Stage Uses Air Bearings
AUBURN, Mass., March 19, 2024 /PRNewswire-PRWeb/ -- PI, a global leader in precision motion control and nanopositioning products releases a unique planar XY-Theta-Z nanopositioning stage based on air bearings and direct drive motors. Unlike conventional multi-axis stages, the A-361 employs only one moving platform shared among all three axes. One of its advantages is the ultra-low profile of only 40mm, despite featuring an integrated vacuum chuck to accommodate wafers or other samples. Engineered as a parallel-kinematic multi-axis system, this stage delivers exceptional precision in a remarkably compact package.
- Unique and compact 3-axis precision motion platform, new from PI
AUBURN, Mass., March 19, 2024 /PRNewswire-PRWeb/ -- PI , a global leader in precision motion control and nanopositioning products releases a unique planar XY-Theta-Z nanopositioning stage based on air bearings and direct drive motors. - One of its advantages is the ultra-low profile of only 40mm, despite featuring an integrated vacuum chuck to accommodate wafers or other samples.
- Engineered as a parallel-kinematic multi-axis system, this stage delivers exceptional precision in a remarkably compact package.
- If precision motion in 6 axes is needed, the A-361 XY-Theta stage can be seamlessly integrated with the A-523 Z Tip/Tilt stage creating a compact 6 degrees of freedom nanopositioning system with only 100mm total height.