Alcatel Micro Machining Systems

Innovative Micro Technology (IMT) Modernizes MEMS Foundry Services with Omega® Rapier™ Plasma Etch Solution from SPTS Technologies

Retrieved on: 
Tuesday, September 22, 2020
Microtechnology, Materials science, Semiconductor device fabrication, Articles, Technology, Etching, Electrical engineering, Mechanical engineering, Microelectromechanical systems, Deep reactive-ion etching, Mems, Alcatel Micro Machining Systems

SANTA BARBARA, Calif., Sept. 22, 2020 /PRNewswire-PRWeb/ -- Innovative Micro Technology (IMT), a global leader in the development and production of complex microelectromechanical systems (MEMS), today announced the purchase of an Omega Rapier plasma etch system from SPTS Technologies, a KLA company.

Key Points: 
  • SANTA BARBARA, Calif., Sept. 22, 2020 /PRNewswire-PRWeb/ -- Innovative Micro Technology (IMT), a global leader in the development and production of complex microelectromechanical systems (MEMS), today announced the purchase of an Omega Rapier plasma etch system from SPTS Technologies, a KLA company.
  • "SPTS Technologies is at the forefront of MEMS manufacturing with its deep reactive ion etch (DRIE) solutions, having been a co-developer and first licensee of the 'Bosch Process'.
  • The addition of the Rapier DRIE capability allows us to offer an industry-leading technology to our foundry customers while expanding capacity for future development and new applications.
  • Innovative Micro Technology, Inc. (IMT) designs and manufactures microelectromechanical systems (MEMS) and wafer-level optics for sensing, communications and biomedical applications.