Lam Research Introduces World's First Bevel Deposition Solution to Increase Yield in Chip Production
This powerful protection increases yield and enables chipmakers to implement new leading-edge processes for the production of next-generation chips.
- This powerful protection increases yield and enables chipmakers to implement new leading-edge processes for the production of next-generation chips.
- Coronus DX is the newest addition to the Coronus® product family and extends Lam's leadership in bevel technology.
- "In the era of 3D chipmaking, production is complex and costly," said Sesha Varadarajan, senior vice present of the Global Products Group at Lam Research.
- "We look forward to continuing to work with Lam Research and its Coronus solutions to enable leading-edge wafer production."