TANAKA Establishes New Method of Recovering Precious Metals Adhering to Vacuum Film Formation Equipment Components
(Head office: Chiyoda-ku, Tokyo; Group CEO: Koichiro Tanaka), which develops industrial precious metals products as one of the core companies of TANAKA Precious Metals, announced that it has established a jig cleaning method called TANAKA Green Shield.
- (Head office: Chiyoda-ku, Tokyo; Group CEO: Koichiro Tanaka), which develops industrial precious metals products as one of the core companies of TANAKA Precious Metals, announced that it has established a jig cleaning method called TANAKA Green Shield.
- After detaching sputtered films adhering to components, mainly made from stainless steel, of vacuum film formation equipment such as sputtering and vacuum deposition equipment, the recovered precious metals are refined and returned to the customer with the precision-cleaned components.
- There are multiple jig cleaning methods for vacuum film formation equipment components, including physical detachment (blast cleaning) and thermal sprayed aluminum base film formation.
- [2] Vacuum film formation equipment: Equipment used in thin film formation processes, including sputtering and deposition, employed in the manufacture of semiconductors
[3] PGM: Platinum group metals comprising six precious metals (platinum, palladium, rhodium, ruthenium, iridium, and osmium)