PICOSUN® Sprinter disrupts fast batch ALD on 300 mm wafers
ESPOO, Finland, Dec. 2, 2020 /PRNewswire/ -- Picosun Group, the leading supplier of AGILE ALD (Atomic Layer Deposition) thin film coating solutions for global industries, has launched Sprinter , a brand new, fully automated high throughput ALD production module for 300 mm wafers.
- ESPOO, Finland, Dec. 2, 2020 /PRNewswire/ -- Picosun Group, the leading supplier of AGILE ALD (Atomic Layer Deposition) thin film coating solutions for global industries, has launched Sprinter , a brand new, fully automated high throughput ALD production module for 300 mm wafers.
- Compared to vertical furnace reactors typically used for batch ALD processing, Sprinter provides higher film quality with lower thermal budget, so it is suitable also for temperature-sensitive devices.
- "PICOSUN Sprinter meets directly the challenges in high volume ALD manufacturing on 300 mm wafers.
- (*)PICOSUNSprinter ALD batch process data on 300 mm Si wafers, Al2O3 process as an example (more data available on request):