Axcelis Announces Shipment of First Purion EXE Power Series SiC High Energy Implanter and Multiple Follow on Shipments of Purion SiC Power Series Implanters
In addition, the Company reported multiple follow on shipments of Purion M Power Series SiC medium current and Purion XE Power Series SiC high energy implanters, to several leading SiC power device manufacturers located in Asia and Europe.